Recommended Models:
Oil-Free Scroll Compressors with Molecular Sieve Dryers
Intelligent VSD Compressors
Why These Compressors?
Semiconductor fabs require ultra-dry, particle-free air (ISO 8573-1 Class 1) for lithography and wafer cleaning. Scroll compressors paired with molecular sieve dryers achieve a dew point of -70°C, ensuring moisture-free air for sensitive processes. Intelligent VSD models dynamically adjust output to match cleanroom demand, reducing energy use by 35%. Vibration-free designs (<2.5 mm/s) protect precision equipment, while remote monitoring systems minimize on-site maintenance.
Key Features:
HEPA filtration to remove 99.97% of particles ≥0.3 µm.
Compatibility with IoT platforms for real-time performance analytics.