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Semiconductor Manufacturing: Ultra-Clean Air Standards

Release Time:2025.04.12 Browse:11

Recommended Models:

  • Oil-Free Scroll Compressors with Molecular Sieve Dryers

  • Intelligent VSD Compressors

Why These Compressors?
Semiconductor fabs require ultra-dry, particle-free air (ISO 8573-1 Class 1) for lithography and wafer cleaning. Scroll compressors paired with molecular sieve dryers achieve a dew point of -70°C, ensuring moisture-free air for sensitive processes. Intelligent VSD models dynamically adjust output to match cleanroom demand, reducing energy use by 35%. Vibration-free designs (<2.5 mm/s) protect precision equipment, while remote monitoring systems minimize on-site maintenance.

Key Features:

  • HEPA filtration to remove 99.97% of particles ≥0.3 µm.

  • Compatibility with IoT platforms for real-time performance analytics.


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