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Why Oil-Free Compressors Are Indispensable
Semiconductor fabrication demands ultra-clean air (ISO 8573-1 Class 0/1) to prevent microscopic defects in chips. Even trace oil or particles can ruin wafer layers during lithography or etching.
Key Applications:
Cleanroom HVAC: Maintain sterile environments for chip production.
Gas Delivery Systems: Supply pure air for chemical vapor deposition (CVD) and plasma etching.
Wafer Cleaning: Oil-free air dries wafers without leaving residues.
Technical Advantages:
HEPA Filtration: Removes 99.97% of particles ≥0.3 µm.
Vibration-Free Operation: Protects delicate equipment with vibration levels <2.5 mm/s.
